%0 Journal Article %1 noauthororeditor %A "Pankratov, E.L" %A "Bulaeva, E.A" %D 2017 %J International Journal on Organic Electronics (IJOE) %K Gas analytical approach convection epitaxy films for homogeneity increasing modeling native of phase %N 1 %P 12 %R 10.5121/ijoe.2017.6101 %T ANALYSIS OF POSSIBILITY OF GROWTH OF SEVERAL EPITAXIAL LAYERS SIMULTANEOUSLY IN GAS PHASES FRAMEWORK ONE TECHNOLOGICAL PROCESS. ON POSSIBILITY TO CHANGE PROPERTIES OF EPITAXIAL LAYERS %U http://airccse.org/journal/IJOE/papers/6117ijoe01.pdf %V 6 %X We analyzed nonlinear model with varying in space and time coefficients of growth of epitaxial layers from gas phase in a vertical reactor with account native convection. We formulate several conditions to increase homogeneity of epitaxial layers with varying of technological process parameters.

@article{noauthororeditor, abstract = {We analyzed nonlinear model with varying in space and time coefficients of growth of epitaxial layers from gas phase in a vertical reactor with account native convection. We formulate several conditions to increase homogeneity of epitaxial layers with varying of technological process parameters. }, added-at = {2018-02-08T13:29:41.000+0100}, author = {"Pankratov, E.L" and "Bulaeva, E.A"}, biburl = {https://www.bibsonomy.org/bibtex/21e54c64a2bccbedbecd24b1d72cbdc37/ijoe_journal}, doi = {10.5121/ijoe.2017.6101}, interhash = {5a41b38b5df0a82db29a0fb2ac87c0b0}, intrahash = {1e54c64a2bccbedbecd24b1d72cbdc37}, journal = {International Journal on Organic Electronics (IJOE)}, keywords = {Gas analytical approach convection epitaxy films for homogeneity increasing modeling native of phase}, month = {January}, number = 1, pages = 12, timestamp = {2018-02-08T13:29:41.000+0100}, title = {ANALYSIS OF POSSIBILITY OF GROWTH OF SEVERAL EPITAXIAL LAYERS SIMULTANEOUSLY IN GAS PHASES FRAMEWORK ONE TECHNOLOGICAL PROCESS. ON POSSIBILITY TO CHANGE PROPERTIES OF EPITAXIAL LAYERS}, url = {http://airccse.org/journal/IJOE/papers/6117ijoe01.pdf}, volume = 6, year = 2017 }