%0 Journal Article %1 pandey_planar_2003 %A Pandey, Santosh %A Ferdous, Zannatul %A White, Marvin H. %D 2003 %J Smart Materials, Structures, and Systems %K MEMS, channel, clamp, electrophysiology, ion micromachining myown patch silicon silicon, %P 814--820 %R 10.1117/12.514745 %T Planar MEMS bio-chip for recording ion-channel currents in biological cells %U https://www.researchgate.net/publication/253216508_Planar_MEMS_bio-chip_for_recording_ion-channel_currents_in_biological_cells %V 5062 %X We describe a planar MEMS silicon structure to record ion-channel currents in biological cells. The conventional method of performing an electrophysiological experiment, 'patch-clamping,' employs a glass micropipette. Despite careful treatments of the micropipette tip, such as fire polishing and surface coating, the latter is a source of thermal noise because of its inherent, tapered, conical structure, which gives rise to a large pipette resistance. This pipette resistance, when coupled with the self-capacitance of the biological cell, limits the available bandwidth and processing of fast transient, ion channel current pulses. In this work, we reduce considerably the pipette resistance with a planar micropipette on a silicon chip to permit the resolution of sub-millisecond, ion-channel pulses. We discuss the design topology of the device, describe the fabrication sequence, and highlight important critical issues. The design of an integrated on-chip CMOS instrumentation amplifier is described, which has a low-noise front-end, input-offset cancellation, correlated double sampling (CDS), and an ultra-high gain in the order of 1000 Giga V/A.

@article{pandey_planar_2003, abstract = {We describe a planar MEMS silicon structure to record ion-channel currents in biological cells. The conventional method of performing an electrophysiological experiment, 'patch-clamping,' employs a glass micropipette. Despite careful treatments of the micropipette tip, such as fire polishing and surface coating, the latter is a source of thermal noise because of its inherent, tapered, conical structure, which gives rise to a large pipette resistance. This pipette resistance, when coupled with the self-capacitance of the biological cell, limits the available bandwidth and processing of fast transient, ion channel current pulses. In this work, we reduce considerably the pipette resistance with a planar micropipette on a silicon chip to permit the resolution of sub-millisecond, ion-channel pulses. We discuss the design topology of the device, describe the fabrication sequence, and highlight important critical issues. The design of an integrated on-chip CMOS instrumentation amplifier is described, which has a low-noise front-end, input-offset cancellation, correlated double sampling (CDS), and an ultra-high gain in the order of 1000 Giga V/A.}, added-at = {2022-07-12T22:41:20.000+0200}, author = {Pandey, Santosh and Ferdous, Zannatul and White, Marvin H.}, biburl = {https://www.bibsonomy.org/bibtex/20c6791babd65f80946651c636bac4101/spandey50}, doi = {10.1117/12.514745}, interhash = {0437bc76cd67f7a63585b2ccc5e56a53}, intrahash = {0c6791babd65f80946651c636bac4101}, issn = {0277-786X}, journal = {Smart Materials, Structures, and Systems}, keywords = {MEMS, channel, clamp, electrophysiology, ion micromachining myown patch silicon silicon,}, language = {en}, month = oct, pages = {814--820}, timestamp = {2022-07-12T22:41:20.000+0200}, title = {Planar {MEMS} bio-chip for recording ion-channel currents in biological cells}, url = {https://www.researchgate.net/publication/253216508_Planar_MEMS_bio-chip_for_recording_ion-channel_currents_in_biological_cells}, urldate = {2022-05-16}, volume = 5062, year = 2003 }