Inproceedings,
Generic lithography modeling with dual-band optics-inspired neural networks.
H. Yang, Z. Li, K. Sastry, S. Mukhopadhyay, M. Kilgard, A. Anandkumar, B. Khailany, V. Singh, and H. Ren.DAC, page 973-978. ACM, (2022)
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- conf/dac/YangLSMKAKSR22
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- DAC
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- 2022
- pages
- 973-978
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- conf/dac/2022
- ee
- https://doi.org/10.1145/3489517.3530580
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- 978-1-4503-9142-9
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- http://dblp.uni-trier.de/db/conf/dac/dac2022.html#YangLSMKAKSR22
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%1 conf/dac/YangLSMKAKSR22
%A Yang, Haoyu
%A Li, Zongyi
%A Sastry, Kumara
%A Mukhopadhyay, Saumyadip
%A Kilgard, Mark
%A Anandkumar, Anima
%A Khailany, Brucek
%A Singh, Vivek
%A Ren, Haoxing
%B DAC
%D 2022
%E Oshana, Rob
%I ACM
%K dblp
%P 973-978
%T Generic lithography modeling with dual-band optics-inspired neural networks.
%U http://dblp.uni-trier.de/db/conf/dac/dac2022.html#YangLSMKAKSR22
%@ 978-1-4503-9142-9
@inproceedings{conf/dac/YangLSMKAKSR22,
added-at = {2022-08-25T00:00:00.000+0200},
author = {Yang, Haoyu and Li, Zongyi and Sastry, Kumara and Mukhopadhyay, Saumyadip and Kilgard, Mark and Anandkumar, Anima and Khailany, Brucek and Singh, Vivek and Ren, Haoxing},
biburl = {https://www.bibsonomy.org/bibtex/27e3f4af5e4d8999501842bdef76bcbf8/dblp},
booktitle = {DAC},
crossref = {conf/dac/2022},
editor = {Oshana, Rob},
ee = {https://doi.org/10.1145/3489517.3530580},
interhash = {b3ae6f39db42c133c94b9ef9974043da},
intrahash = {7e3f4af5e4d8999501842bdef76bcbf8},
isbn = {978-1-4503-9142-9},
keywords = {dblp},
pages = {973-978},
publisher = {ACM},
timestamp = {2024-04-10T01:57:45.000+0200},
title = {Generic lithography modeling with dual-band optics-inspired neural networks.},
url = {http://dblp.uni-trier.de/db/conf/dac/dac2022.html#YangLSMKAKSR22},
year = 2022
}