%0 Journal Article %1 journals/tim/FirebaughCEKW04 %A Firebaugh, Samara L. %A Jr., Harry K. Charles %A Edwards, R. L. %A Keeney, A. C. %A Wilderson, S. F. %D 2004 %J IEEE Trans. Instrumentation and Measurement %K dblp %N 4 %P 1047-1051 %T Optical deflection measurement for characterization of microelectromechanical systems (MEMS). %U http://dblp.uni-trier.de/db/journals/tim/tim53.html#FirebaughCEKW04 %V 53

@article{journals/tim/FirebaughCEKW04, added-at = {2016-03-09T00:00:00.000+0100}, author = {Firebaugh, Samara L. and Jr., Harry K. Charles and Edwards, R. L. and Keeney, A. C. and Wilderson, S. F.}, biburl = {https://www.bibsonomy.org/bibtex/252c23d8f7867a9d890c56936003ebbcf/dblp}, ee = {http://dx.doi.org/10.1109/TIM.2004.831504}, interhash = {8f9657e70261cfd5463e6baca65333bc}, intrahash = {52c23d8f7867a9d890c56936003ebbcf}, journal = {IEEE Trans. Instrumentation and Measurement}, keywords = {dblp}, number = 4, pages = {1047-1051}, timestamp = {2016-03-10T18:42:13.000+0100}, title = {Optical deflection measurement for characterization of microelectromechanical systems (MEMS).}, url = {http://dblp.uni-trier.de/db/journals/tim/tim53.html#FirebaughCEKW04}, volume = 53, year = 2004 }